PFG - Red sensitive photomaterials for photomasks

Sales office : Geola uab, PO Box 343, 2006-LT, Vilnius, Lithuania
phone: +37052132737, fax: +37052132838

info@geola.com
 


Figure 1 : Characteristic curve for PFG material.



Figure 2: Grain Size Distribution Curve for PFG material.

VRP Developer
(concentrated solution)

Sodium Sulfite (Anhydrous) 194g
Hydroquinone 25g
Potassium Hydroxide 22g
Potassium Bromide 20g
Potassium Metaborate 140g
1,2,3-Benzotriazole 0.1g
Distilled water to 1litre

Working solution: 1 part of developer + 6 parts of distilled water.

Fixer (simple)

Sodium Thiosulphate Pentahydrate 300 g
Sodium Disulfite  20 g
Water to 1L

Fixer with hardening (adds 20% to the strength of the emulsion layer)

Alum, KAl(SO4)2*12H2O 15g
Oxalic acid H2C2O4*2H2O 7g
Boric Acid (H3BO3) 15g
Sodium Sulfite (Anhydrous) Na2SO3 15g
Ammonium chloride NH4Cl 50g
Sodium Thiosulfate Pentahydrate Na2S2O3 *5H2O 300
Hydroxylamine sulfate NH2OH : 0,5H2SO4 1.5g
Water 1.0L till pH of 4.0±0.3 is achieved

Stop Bath

Acetic Acid 20g
Water to 1.0L

Bleach

Ammonium Dichromate
or
Potassium Dichromate
7g
Sulfuric Acid concentrated 10ml
Water to 1.0L

Brightener

Sodium Sulfite Anhydrous 20g
Water to 1.0L

 

The PFG Silver Halide materials are equivalent to the well-known technical photo-materials previously produced by Agfa and Kodak. All materials can optionally be supplied coated onto Polyester or Triacetate substrate films. The characteristic curve for the PGF is shown in Figs. 1. The grain size distribution is shown in Fig. 2.

PFG photographic plates are a practical replacement for Agfa (Millimask) and Kodak (HR-P, TE) plates. The plates are specifically designed for the manufacturing of high-precision photographic masks for microelectronics. High resolution, high durability and excellent adhesion of the emulsion layer to the glass substrate enable photographic features of less than 2.5 micrometers to be recorded.

Parameter PFG
Average sensitivity, ISO
Negative process:
Reversal Process:

0.02
0.04
Contrast, not less than: 5
Max. Density, not less than: 3
Spectral sensitization maximum, nm: 640
Spectral sensitization region, nm: 600-680
Fog Density, not more than: 0.02
Resolving Power, mm-1, not less than: 3,000
Strength of emulsion layer after processing, kg force, not less than:  0.9
Temperature of emulsion layer deformation, oC, not less than: 55

Table 1: PFG materials characteristics

All photo-plates are usually supplied in a cardboard package containing 6 units each. The largest plate size available as a standard size is 406x300 mm. The standard glass thickness is 2.5 mm. Antireflection plates coating on request. 
Guaranteed lifetime - 12 months. 

Processing and Handling Recommendations:
- Unseal and process in indirect non-actinic light with use of a dark-green light filter (transmission zone - 530 nm and less).
- Temperature of processing solutions - 20±2°C.
- Storage condition: Humidity 65% and 12-15deg. Celsius.


Table 2. Recommended processing for PFG materials for the masks production
Negative process
Temperature of solutions
Exposure    
Developing Concentrated VRP developer diluted in distilled water 1:5, 4-5min
20
Wash Rinsing water 3 min
17±2
Fixing Fixer, 5-10 min
20
Wash Water 3 min
17±2
Final Wash Water with wetting agent (Agepon) 1min
17±2
Drying Slow Air
20±4
Reversal process  
Exposure    
Developing Concentrated VRP developer diluted in distilled water 1:1.7, 4-5min
20
Wash Rinsing water, 3 min
17±2
Bleaching Bleach, 1.5 min
20
Wash Rinsing water, 3 min
17±2
Brightening Brightener, 3 min
20
Wash Rinsing water, 5 min
17±2
Lighting 500 W lamp, 70cm distance from the emulsion, 1 min  
Second Developing Concentrated VRP developer diluted in distilled water 1:5 - 3 minutes
20
Wash Rinsing water, 1 min
17±2
Fixing Fixer, 2 min
20±4
Wash Rinsing water, 3 min
17±2
Final wash Water with wetting agent (Agepon) 1min
17±2
Drying Slow Air
20±4