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PFG - Red sensitive photomaterials for
photomasks
Sales office : Geola
uab, PO Box 343, 2006-LT, Vilnius, Lithuania
phone: +37052132737, fax: +37052132838
info@geola.com
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Figure 1 : Characteristic curve for PFG material.

Figure 2: Grain Size Distribution Curve for PFG material.
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VRP Developer
(concentrated solution) |
| Sodium Sulfite (Anhydrous) |
194g |
| Hydroquinone |
25g |
| Potassium Hydroxide |
22g |
| Potassium Bromide |
20g |
| Potassium Metaborate |
140g |
| 1,2,3-Benzotriazole |
0.1g |
| Distilled water |
to 1litre |
|
Working solution: 1 part of developer + 6 parts of distilled water. |
|
Fixer (simple) |
| Sodium Thiosulphate Pentahydrate |
300 g |
| Sodium Disulfite |
20 g |
| Water |
to 1L |
|
Fixer with hardening (adds 20% to the strength of the emulsion layer) |
| Alum, KAl(SO4)2*12H2O |
15g |
| Oxalic acid H2C2O4*2H2O |
7g |
| Boric Acid (H3BO3) |
15g |
| Sodium Sulfite (Anhydrous) Na2SO3 |
15g |
| Ammonium chloride NH4Cl |
50g |
| Sodium Thiosulfate Pentahydrate Na2S2O3 *5H2O |
300 |
| Hydroxylamine sulfate NH2OH : 0,5H2SO4 |
1.5g |
| Water |
1.0L till pH of 4.0±0.3 is achieved |
|
Stop Bath |
| Acetic Acid |
20g |
| Water |
to 1.0L |
|
Bleach |
Ammonium Dichromate
or
Potassium Dichromate |
7g |
| Sulfuric Acid concentrated |
10ml |
| Water |
to 1.0L |
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Brightener |
| Sodium Sulfite Anhydrous |
20g |
| Water |
to 1.0L |
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The PFG Silver Halide materials are equivalent to the well-known technical photo-materials previously produced by Agfa and Kodak. All materials can optionally be supplied coated onto Polyester or Triacetate substrate films. The characteristic curve for the PGF is shown in Figs. 1. The grain size distribution is shown in Fig. 2.
PFG photographic plates are a practical replacement for Agfa (Millimask) and Kodak (HR-P, TE) plates. The plates are specifically designed for the manufacturing of high-precision photographic masks for microelectronics. High resolution, high durability and excellent adhesion of the emulsion layer to the glass substrate enable photographic features of less than 2.5 micrometers to be recorded.
| Parameter |
PFG |
Average sensitivity, ISO
Negative process:
Reversal Process: |
0.02
0.04 |
| Contrast, not less than: |
5 |
| Max. Density, not less than: |
3 |
| Spectral sensitization maximum, nm: |
640 |
| Spectral sensitization region, nm: |
600-680 |
| Fog Density, not more than: |
0.02 |
| Resolving Power, mm-1, not less than: |
3,000 |
| Strength of emulsion layer after processing, kg force, not less than: |
0.9 |
| Temperature of emulsion layer deformation, oC, not less than: |
55 |
Table 1: PFG materials characteristics
All photo-plates are usually supplied in a cardboard package containing 6 units each. The largest plate size available as a standard size is 406x300 mm. The standard glass thickness is 2.5 mm. Antireflection plates coating on request.
Guaranteed lifetime - 12 months.
Processing and Handling Recommendations:
- Unseal and process in indirect non-actinic light with use of a dark-green light filter (transmission zone - 530 nm and less).
- Temperature of processing solutions - 20±2°C.
- Storage condition: Humidity 65% and 12-15deg. Celsius.
| Table 2. Recommended processing for PFG materials for the masks production |
| Negative process |
Temperature of solutions |
| Exposure |
|
|
| Developing |
Concentrated VRP developer diluted in distilled water 1:5, 4-5min |
20 |
| Wash |
Rinsing water 3 min |
17±2 |
| Fixing |
Fixer, 5-10 min |
20 |
| Wash |
Water 3 min |
17±2 |
| Final Wash |
Water with wetting agent (Agepon) 1min |
17±2 |
| Drying |
Slow Air |
20±4 |
| Reversal process |
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| Exposure |
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|
| Developing |
Concentrated VRP developer diluted in distilled water 1:1.7, 4-5min |
20 |
| Wash |
Rinsing water, 3 min |
17±2 |
| Bleaching |
Bleach, 1.5 min |
20 |
| Wash |
Rinsing water, 3 min |
17±2 |
| Brightening |
Brightener, 3 min |
20 |
| Wash |
Rinsing water, 5 min |
17±2 |
| Lighting |
500 W lamp, 70cm distance from the emulsion, 1 min |
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| Second Developing |
Concentrated VRP developer diluted in distilled water 1:5 - 3 minutes |
20 |
| Wash |
Rinsing water, 1 min |
17±2 |
| Fixing |
Fixer, 2 min |
20±4 |
| Wash |
Rinsing water, 3 min |
17±2 |
| Final wash |
Water with wetting agent (Agepon) 1min |
17±2 |
| Drying |
Slow Air |
20±4 |
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